Articles
Asymetric Homogenizer Enables Uniform Illumination At Tilted Surface For Inspection And Metrology Tools
April 7, 2009
Most of the detection tools (e.g. camera system) for analysing surface properties have to be located perpendicular to the inspected surface. Furthermore it is necessary to illuminate this surface homogenously.
Classic homogenizers enable uniform intensity distribution only in the plane normal to the light propagation. If both (detection and illumination unit) are placed orthogonal to the qualifying surface, they would disturb each other.
Thus a new kind of asymmetric homogenizer is introduced. This is a micro-lens array consisting of micro-lenses with different profiles. Free form surface of every individual micro-lens enables a uniform illumination at the tilted surface.
LIMO's standard illumination tool for tilted homogenization generates 300x340mm2 field at the angle of 55°, in a working distance of 1.5 meter and with inhomogeneity less than 5%. On the request illumination of other angles, fields and working distance is possible.
Compared to traditional methods, the tilted illumination affords obvious advantages for the process. Since only one illumination device is needed, instead of the conventional two ones, the cost can almost be reduced half. Furthermore, the efficient signal detection can simplify and accelerate the whole progress.
Please visit www.limo.de for further information
SOURCE: LIMO Lissotschenko Microoptic Inc.
